Horizontal Diffusion Furnace

LPCVD Furnace

PECVD Furnace

Equipment for Solar Cell Production

Ultra High Purity Gas Delivery Systems

External Burn System

Chemical Control Panel and Precursor Temperature Controller

Control System SVconCS


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Horizontal Diffusion Furnace for High Process Performance

The design of the SVCS atmospheric diffusion furnaces combines the multiple process capability with the needs of a maximum

capacity for full production system (SVaFUR-FP) and high flexibility small scale versions for use in research and pilot

production (SVaFUR-RD). It provides an easy-to-maintain, safe and reliable horizontal furnace platform. The SVCS

design is outstanding for high efficiency, minimised footprint and low cost of ownership while offering high process flexibility.


  • Diffusion (drive-in) high temperature procesess
  • Doping from solid, liquid and gaseous dopant sources e.g.: BBr₃, B2H6, POCL₃, PH₃, BN
  • Various thermal processing e.g. annealing, curing, sintering
  • Pyrogenic Wet Oxide with External Burning System
  • Wet Oxide with ultra pure steamer
  • Dry Oxide
  • HiPOx (High Pressure Oxide)
  • DCE or HCl optional for all processes




  • State of the art modular control system, inhouse designed, highly tailored and inhouse manufactured
  • Top notch components always selected for excelent results and trouble free long life of the furnace equipment
  • Up to 4 stacked quartz or SiC tube reactor chambers for various procesess
  • Advanced water cooling tube level system: no thermal interference between different tubes
  • Contactless fully automated boat-in-tube loading both cantilever or softloading configurations
  • Maintenance friendly mechanical design



Wafer size 150mm, 200mm, 300mm or any custom size
Wafer load FP: 150+
  RD: 25 (typical)
Heating system 3 or 5 zone
Flat zone FP: up to 1067 mm (42")
  RD: down to 300 mm(12")
  ± 0.5°C across flat zone
Process temperature 200°C to 1300°C
Power consumption 95kW – 165kW depending on tube configuration
Power supply 150 mm: 3-phase, 400 or 480VAC, 140 A, 50 or 60 Hz
  200 mm: 3-phase, 400 or 480VAC, 160A, 60Hz
  (system is always adapted to country- specific power supply network)
Clean dry air 70 – 110 psig (4,8 to 7,6 bar)

Cooling water

40 - 60 LPM
Exhaust 210m³/h per tube
Options Boat elevator and wafer handling automation